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Full Survey Chemical Analysis of Thin Films with Pulsed Fast Flow Glow Discharge Mass Spectrometry

Team TFS
Team TFS
Application Note 30267. High resolution glow discharge mass spectrometry is broadly recognized as one of the most sensitive and robust analytical techniques for direct bulk trace element determinations. However, due to the nature of the magnetic field, scan speed is traditionally considered to be a limiting factor for depth specific measurements and thus unsuitable for thin film or layer analysis.
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Last update:
‎10-16-2013 07:41 AM
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