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claudia-bouman
Team TFS
Team TFS
Determination of ultratrace elements in semiconductor grade TMAH developer
Julian D. Wills and Joachim Hinrichs
Thermo Fisher Scientific, Bremen, Germany
AN30072
To demonstrate the suitability of the Thermo Scientific™ Element 2™ High Resolution ICP-MS for trace metals analysis in high purity samples, related to the manufacture of semiconductors.
  • HR-ICPMS
  • Element 2
  • Semi-Conductor
  • TMAH
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Last update:
‎11-09-2021 03:53 AM
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