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Determination of ultra trace elements in semiconductor grade Isopropyl Alcohol (IPA) by high sensitivity ICP-MS

Team TFS
Team TFS
Application Note 43176. To determine ultra-trace metal concentrations in semiconductor grade nitric acid (HNO3). Demonstrate the use of cold plasma (CP) and kinetic energy discrimination (KED) to reduce background equivalent concentrations (BEC) and improve detection limits (LoD). Demonstrate the use of the iCAP Qs ICP-MS to perform reproducible ultra-trace ng/L (ppt) measurements of semiconductor relevant elements in nitric acid.
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Last update:
‎10-16-2013 07:40 AM
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