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Team TFS
Team TFS
Thermo Fisher Scientific, Bremen, Germany
Analysis of Sulfuric Acid to Meet SEMI Tier C Requirements Using a Single Set of Operating Conditions with Sector Field ICP-MS
Julian D. Wills, Meike Hamester, Torsten Lindemann and Lothar Rottmann
Thhis note describes the ability of the Thermo Scientific ELEMENT 2 Sector Field ICP-MS to provide the sensitivity, selectivity and stability to meet SEMI guidelines for the multi-elemental ICP-MS analysis of H2SO4 to SEMI Tier C levels using a single set of plasma parameters.
  • Element 2
  • Semiconductor
  • Mineral Acids
Version history
Last update:
‎11-09-2021 04:08 AM
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