Analysis of Sulfuric Acid to Meet SEMI Tier C Requirements Using a Single Set of Operating Conditions with Sector Field ICP-MS

[claudia-bouman]

Thermo Fisher Scientific, Bremen, Germany
AN30105
Analysis of Sulfuric Acid to Meet SEMI Tier C Requirements Using a Single Set of Operating Conditions with Sector Field ICP-MS
Julian D. Wills, Meike Hamester, Torsten Lindemann and Lothar Rottmann
Thhis note describes the ability of the Thermo Scientific ELEMENT 2 Sector Field ICP-MS to provide the sensitivity, selectivity and stability to meet SEMI guidelines for the multi-elemental ICP-MS analysis of H2SO4 to SEMI Tier C levels using a single set of plasma parameters.

• HR-ICPMS
• Element 2
• Semiconductor
• Mineral Acids