1) Thermo Fisher Scientific, Bremen, Germany, 2) IBM Corporation, Hopewell Junction, NY, USA
AN30009
Analysis of Semiconductor Grade Mineral Acids by Sector Field ICP-MS
Julian D. Wills (1) and Greg Settembre (2)
This note describes the development of an ICP-MS method for the analysis of SEMI Tier C HCl using the Thermo Scientific ELEMENT 2 Sector Field ICP-MS. This isntrument has been shown to provide the sensitivity, resistance to matrix, reliability and elemental selectivity to allow the determination of sub pg/g concentrations in process chemicals used in the semiconductor industry.
- HR-ICPMS
- Element 2
- Semi-Conductor
- Mineral Acids
United States
